About: http://webisa.webdatacommons.org/234091395

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Workpiece W may be, for example, a semiconductor substrate, such as silicon, on which patterns have been formed, where the patterns correspond to product devices (e.g. electronic circuits).
http://www.w3.org/ns/prov#wasQuotedFrom	google.com