About: http://webisa.webdatacommons.org/234099985

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	For example, the surfaces corresponding to the half-etched regions 402(c)-1, 402(c)-2, prior to etching, may be covered with a material such as a photoresist or tape (e.g., polyimide tape).
http://www.w3.org/ns/prov#wasQuotedFrom	google.com