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PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • For example, the barrier layer 2 may also be a metal nitride, such as TaN, HfN or TiN. A thin layer of metal 3 such as Co, Fe or Ni is then deposited onto the barrier layer 2 (see FIG. 2B).
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  • google.com