About: http://webisa.webdatacommons.org/234661824

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A plurality of grooves or trenches, holes, and other openings are formed in thick PSG layer 417 by any suitable means such as photolithographic patterning and etching.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com