About: http://webisa.webdatacommons.org/234903808

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Trenches 24 are then filled with an insulating material such as silicon dioxide using a deposition process that has good gapfill properties.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com