About: http://webisa.webdatacommons.org/235215439

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	It is another object of the present invention to provide a method or apparatus for manufacture of microdevices such as semiconductor devices, using such an inspection method.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com