About: http://webisa.webdatacommons.org/235292113

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A method for forming the film 12 containing Al as a principal component can be any film forming method, including resistance heating evaporation, EB evaporation, sputtering, CVD, and so on.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com