About: http://webisa.webdatacommons.org/235303374

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Embodiments of the invention are particularly useful for integrated circuits in which the trench and via strata portions of the dielectric layers are inorganic, silicon-containing material.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au