About: http://webisa.webdatacommons.org/235423828

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In another embodiment, metal film 20 is a metal such as titanium (Ti), zirconium (Zr), hafnium (Hf), or the like or combinations thereof.
http://www.w3.org/ns/prov#wasQuotedFrom	google.de