About: http://webisa.webdatacommons.org/23544552

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	transcription and the limitation on the resolution in a photographing device, such as a CCD camera and the like, for the mask defect detection.
http://www.w3.org/ns/prov#wasQuotedFrom	patents.com