About: http://webisa.webdatacommons.org/235555922

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In one embodiment, the inert gas may be supplied in the gas mixture at a flow rate of less than about 3000 sccm, such as about 2000 sccm.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com