About: http://webisa.webdatacommons.org/235626898

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In the alignment, the defect review SEM 1 determines the X-Y coordinates of the defective spots to the origin O1 in the effective chip area or in the area other than the area where the X-Y coordinate system is newly set.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com