About: http://webisa.webdatacommons.org/235702913

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	On substrates and especially on silicon wafers, micromechanical structures can also be applied onto or into the surface of the substrate.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es