About: http://webisa.webdatacommons.org/235702948

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In the apparatus, each of six chemical liquid supply units 61 included in a chemical liquid supply apparatus shown in FIG. 1 is detachably assembled in an integrated holding member such as a rack, a case 62, or the like.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com