| http://www.w3.org/ns/prov#value | - In other embodiments, the contact material could be polysilicon, aluminum, tungsten silicide, tungsten polycide, tungsten hexafluride/silane, titanium silicide or other suitable materials, and or the contact material could be deposited using CVD (e.g., CVD, LPCVD, APCVD or PECVD) or some other process.
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