About: http://webisa.webdatacommons.org/235794566

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In this case for example a valve or a fan can be present for supply of gas to the intermediate chamber, the valve setting or fan power of which is regulated for setting the first gas pressure in the intermediate chamber.
http://www.w3.org/ns/prov#wasQuotedFrom	freshpatents.com