About: http://webisa.webdatacommons.org/236005885

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Main focus of the conference was on the topics such as generation of HIPIMS plasma, characterisation of Plasma and Coatings both in reactive and non-reactive HIPIMS processes and simulation of HIPIMS processes.
http://www.w3.org/ns/prov#wasQuotedFrom	ruhr-uni-bochum.de