PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • at least one holding device including a support having a first end for supporting the chip, a vacuum chamber arranged in the support, the first end comprising an opening that communicates with the vacuum chamber, an annular seal arranged around the opening at the first end, and a vacuum source which evacuates the vacuum chamber, the support being mounted on a movable stand;
http://www.w3.org/ns/prov#wasQuotedFrom
  • google.com