About: http://webisa.webdatacommons.org/236298479

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Fifth, any solution other than the resist solution used in the first embodiment may be applied to the wafer 1 to form a film thereon.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com