About: http://webisa.webdatacommons.org/23675457

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	the metal or the alloy mainly comprising the metal, and the formation easiness of the alloy of multi-component systems having different vapor pressures, the metal atom deposition method using the sputtering is more preferable.
http://www.w3.org/ns/prov#wasQuotedFrom	patents.com