PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • Etching is a process that removes material (e.g., a thin film on a substrate or the substrate itself) by chemical or physical reaction or both.
http://www.w3.org/ns/prov#wasQuotedFrom
  • google.com.au