About: http://webisa.webdatacommons.org/237078367

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	As illustrated in FIG. 4, the resulting gate contact opening can be filled with a conductive material, such as metal or other appropriate material, and planarized to form gate plug 260.
http://www.w3.org/ns/prov#wasQuotedFrom	google.ca