About: http://webisa.webdatacommons.org/237820530

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Referring to FIGS. 1 and 5, the method 100 proceeds to step 108 in which the hard mask layer 240 is removed by a suitable method such as wet etching.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com