About: http://webisa.webdatacommons.org/23821305

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	As referenced above, the stencil filters 34 and 36 are displaceable relative to one another to provide desired regional variations in plasma etch characteristics, such as plasma flow size, shape, and/or distribution.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com