About: http://webisa.webdatacommons.org/238216518

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Referenced by (7), Classifications (14), Legal Events (5) External Links: USPTO, USPTO Assignment, EspacenetUsed in manufacturing electronic devices such as semiconductor devices and liquid crystal displays by using photolithography
http://www.w3.org/ns/prov#wasQuotedFrom	google.ca