About: http://webisa.webdatacommons.org/238453615

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Next, a thin metal film consisting of an electrode material such as Pt or Au is formed on the insulating substrate 21 of the lid structure 23 by deposition, sputtering, ion plating, or the like.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com