About: http://webisa.webdatacommons.org/238508949

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Yes, this is a real tool. it is the mask scrubber ... whose name is a badly spelled version of that. The thing with the clear plexiglass hemisphere that is to the left of the litho solvent hood.
http://www.w3.org/ns/prov#wasQuotedFrom	stanford.edu