About: http://webisa.webdatacommons.org/238702905

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Referring to FIGS. 3A and 3B, for the definition of the active areas 12, isolation trenches 2 next are formed, which will be filled up with an insulating material, in particular silicon dioxide.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com