About: http://webisa.webdatacommons.org/238979967

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIGS. 25A and 25B are a plan view and a side view of an isolation mask by a phase shifter of adjacent x-y direction patterns;
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au