About: http://webisa.webdatacommons.org/239111414

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	a substrate including a primary surface and a trench, wherein the trench extends into a semiconductor material and comprises:
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr