About: http://webisa.webdatacommons.org/239254742

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	An oxide such as silicon oxide having a thickness between about 10 and 1000 Angstroms is deposited by a CVD or PECVD technique to form a conformal oxide layer 110 on substrate 100.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com