About: http://webisa.webdatacommons.org/239267234

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In another embodiment, the substrate 101 may be a different material, such as silicon or ceramic.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com