About: http://webisa.webdatacommons.org/239271452

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In the second part of our project, microstructure, e.g. grain size, of thin films (e.g. Cu) will be varied by changing deposition variables, postdeposition processing and alloying.
http://www.w3.org/ns/prov#wasQuotedFrom	ugent.be