About: http://webisa.webdatacommons.org/239462053

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In the present invention, the minimum feature size, i.e., abbreviated as MD in FIG. 7, of the protect shape is a dimension that is easily printed without benefit of phase shifting.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com