About: http://webisa.webdatacommons.org/239469592

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	An interlayer 61 including an oxide such as silicon oxide is at the top surface of the pillar 60.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com