About: http://webisa.webdatacommons.org/239479798

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In addition, defect-free resist layers have to be formed on the substrates, for example on silicon wafers or on wafers coated with a bottom resist, using the known coating methods.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com