About: http://webisa.webdatacommons.org/239593518

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Further, the interconnection layers 22W-25W and the via-plugs 22P1, and 22P2 and 23P-26P can be formed also by using Al or an Al alloy or other conductors.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com