About: http://webisa.webdatacommons.org/239882494

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A trench capacitor is a three dimensional device formed by etching a trench into a semiconductor substrate.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com