About: http://webisa.webdatacommons.org/240093215

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Each of the vectors is a factor by which the Fourier plane intensity value for each of the sub-areas of a scanned portion on the wafer will be multiplied.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com