About: http://webisa.webdatacommons.org/24012753

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Of course, equipment other than a laser may be used to create an opening, such as micro-drills made in silicon.
http://www.w3.org/ns/prov#wasQuotedFrom	google.de