About: http://webisa.webdatacommons.org/24017183

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	If cooling member 26 is made from copper, the copper preferably includes a coating, such as Ni, that protects the copper from corrosion and also prevents copper ions from contaminating wafer 12.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com