About: http://webisa.webdatacommons.org/24023991

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	After contact holes for the capacitor are formed, a conductive film such as polysilicon is deposited on the insulating film 15 and patterned to form a storage electrode and connection terminals.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com