About: http://webisa.webdatacommons.org/240330298

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	an impurity concentration for example of 1014 -1017 cm-3 ! was formed f
http://www.w3.org/ns/prov#wasQuotedFrom	freepatentsonline.com