About: http://webisa.webdatacommons.org/24049797

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A further important advantage of the present invention is that the stress of the deposited inorganic film can be varied, depending on the parameters such as the microwave power and gas pressure.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com