| http://www.w3.org/ns/prov#value | - As a result, monolayer 47 can be electrically conductive so as to pass current but yet there is enough [O] to stop Ge which may otherwise diffuse into the subsequently deposited poly-Si layer, shown in FIG. 3D. Thus, SiO2 or SixGeyOz monolayer 47 is a barrier to Ge but yet does not create a significant resistance to current flow in the gate stack.
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