About: http://webisa.webdatacommons.org/240691291

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	As a polishing pad stuck on the upper surface of each platens 53 a, 53 b, and 53 c, the polishing pad which uses, for example foaming polyurethane as the main ingredients can be used.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com