About: http://webisa.webdatacommons.org/240692123

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	SOI substrates, i.e. SOI wafers, are used particularly in the manufacture of small structures requiring great precision, in which they act as an electrically insulating base material.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com