About: http://webisa.webdatacommons.org/240723120

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	As a pattern is becoming finer in recent years, however, there is a case that de-ionized water on a substrate cannot be sufficiently removed only by the draining operation for drying.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr