About: http://webisa.webdatacommons.org/240978040

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	During CMP or etching steps such as those described above, it is often preferable to provide some sort of CMP stop or etch stop at a location defining the extent of the removal process.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com