About: http://webisa.webdatacommons.org/241279653

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Application of the Second Embodiment This application is directed to the arraying of the semiconductor devices including the MEMS deformable mirrors described above.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com